Description
Hands-on design, fabrication, and testing of micro electro-mechanical systems (MEMS). Processes including oxidation, photolithography, etching, wet processing, and metal deposition applied to MEMS. Design problems for MEMS transducer components such as cantilever beam actuators, membrane deflection sensors, and microfluidic flow channels.
Prerequisite: CE 112 or MATE 25 or EE 98.
Misc/Lab: Lecture 2 hours/lab 3 hour.
Grading
Normal Grade Rules
Units
3
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