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MATE 270

Methods of Thin Film Deposition

Description
Chemical and physical methods of thin film deposition including evaporation, sputtering, chemical vapor deposition, and electroplating. Thermodynamics and kinetics of growth; considerations for reactor design; control of deposition to alter film properties; deposition processes used for metals, dielectrics and semiconductors. Prerequisite: MATE 152 (or equivalent).

Grading
Normal Grade Rules

Units
3