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MATE 232


Plasma Processing of Materials

Description
Principles of low temperature plasmas used for materials processing, including plasma fundamentals, plasma chemistry, collision and heating mechanisms and diagnostics. Material interactions in plasma assisted etching, deposition, and surface treatment will be emphasized. Prerequisite: MATE 133A, MATE 25, and PHYS 51 or equivalent courses.

Grading
Normal Grade Rules

Units
3

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